XYZ Linear Stages

Xeryon precision stages can be combined into different configurations such as XY, XTheta or XYTheta. The matching mounting hole patterns of our different stages makes it very easy to build any configuration without the use of custom adapter plates.

These multi-axis setups allow you to position with nanometer precision and repeatability in multiple degrees of freedom. Thanks to the ultrasonic piezo drive technology of the individual stages, your multi-axis setup will have a long lifetime, position fast and noiseless and holds its position when powered off. One can even move at very low and constant speeds (µm/s).

These features make it the perfect microscope stage or multi-axis sample stage for material science applications. All of our stages can be used in vacuum.


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Markus Eib

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