ZiC - Interference Contrast

DIC (differential interference contrast) is a purely qualitative imaging option available on many common optical microscopes. Zeta has taken this capability to the next level, offering its users the ability to convert the high resolution interference contrast images into quantitative surface roughness numbers. The ZIC option allows the inspection of super smooth surface roughness of the order of 5Å. Critical defects on wafers and disk substrates such as thin film contaminants can be easily visualized and measured with the ZIC option.

The ZIC technique is objective independent and neither does not require special objectives. The Zeta Optics Module can work with standard, off-the-shelf objectives to generate the high resolution ZIC images.

Additional Information
Key number: 507
Dr. Toni Beckmann

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