ZDot Optics

Difficult surfaces made easy with Zeta’s ZDot optics.

  • Very rough surface
  • Very dark surface
  • Deep trenches
  • Multi layer transparent surfaces

The patented ZDot enables ZETA's optical profilers to measure surfaces other systems can not even see.

The ZDot starts with an advanced illumination and optical design that is significantly more efficient than a conventional microscope.  Within this illumination path, we added a precision focusing pattern, the ZDots.  It allows the system to reliably and accurately detect the surface (even very rough or very dark surfaces).  This innovative optical design combined with our proprietary algorithms results in a very flexible system that is highly tolerant of the sample surface variation, without any loss of resolution.

Additional Information
Key number: 507
Dr. Toni Beckmann

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