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ZSi - Shearing Interferometry

The Zeta Shearing Interferometer (ZSI) further enhances ZIC technique by incorporating a proprietary phase adjustment mechanism and advanced algorithm. The result is an optical profiler with sub-Angstrom level Z sensitivity.
The ZSI technique requires neither expensive interferometric objectives, nor special vibration isolation tables. In addition, no Z scanning is necessary. All these translate to better XY resolution, higher level of user friendliness, faster and more reliable data acquisition, and less facility and maintenance related costs.

Additional Information
Key number: 507
Dr. Toni Beckmann

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