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ZSi - Shearing Interferometry

The Zeta Shearing Interferometer (ZSI) further enhances ZIC technique by incorporating a proprietary phase adjustment mechanism and advanced algorithm. The result is an optical profiler with sub-Angstrom level Z sensitivity.
The ZSI technique requires neither expensive interferometric objectives, nor special vibration isolation tables. In addition, no Z scanning is necessary. All these translate to better XY resolution, higher level of user friendliness, faster and more reliable data acquisition, and less facility and maintenance related costs.


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Additional Information
Key number: 507
Contact:
Dr. Toni Beckmann

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